Multi degree-of-freedom micromotor utilizing an electrothermal actuator array and a spherical rotor

Multi degree-of-freedom micromotor utilizing an electrothermal actuator array and a spherical rotor

10.4028/www.scientific.net/AMR.254.115

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Bibliographic Details
Main Authors: Mu, X., Sun, W., Feng, H., Zhou, G., Siong, C.F.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Actuator array
MEMS
Micromotor
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73646
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Institution: National University of Singapore
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Summary:10.4028/www.scientific.net/AMR.254.115

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