Tool-based compound micro/nano-machining

10.1243/17547164C0012009007

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Bibliographic Details
Main Authors: Rahman, M., Asad, A.B.M.A., Masaki, T., Saleh, T., Nath, C., Wong, Y.S., Kumar, A.S., Lim, H.S.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73965
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Institution: National University of Singapore
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Summary:10.1243/17547164C0012009007