Dynamic analysis of an electrostatic micropump

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

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Bibliographic Details
Main Authors: Jiang, T.Y., Ng, T.Y., Lam, K.Y.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/74986
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Institution: National University of Singapore