Application of laser-cleaning technique for efficient removal of via-etch-induced polymers

Journal of the Electrochemical Society

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Bibliographic Details
Main Authors:	Lee, Y.-P., Loong, S.-T., Zhou, M.-S., Lu, Y.-F.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80299
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80299
record_format	dspace
spelling	sg-nus-scholar.10635-802992015-02-12T15:03:18Z Application of laser-cleaning technique for efficient removal of via-etch-induced polymers Lee, Y.-P. Loong, S.-T. Zhou, M.-S. Lu, Y.-F. ELECTRICAL ENGINEERING Journal of the Electrochemical Society 145 11 3966-3973 JESOA 2014-10-07T02:56:00Z 2014-10-07T02:56:00Z 1998-11 Article Lee, Y.-P.,Loong, S.-T.,Zhou, M.-S.,Lu, Y.-F. (1998-11). Application of laser-cleaning technique for efficient removal of via-etch-induced polymers. Journal of the Electrochemical Society 145 (11) : 3966-3973. ScholarBank@NUS Repository. 00134651 http://scholarbank.nus.edu.sg/handle/10635/80299 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of the Electrochemical Society
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lee, Y.-P. Loong, S.-T. Zhou, M.-S. Lu, Y.-F.
format	Article
author	Lee, Y.-P. Loong, S.-T. Zhou, M.-S. Lu, Y.-F.
spellingShingle	Lee, Y.-P. Loong, S.-T. Zhou, M.-S. Lu, Y.-F. Application of laser-cleaning technique for efficient removal of via-etch-induced polymers
author_sort	Lee, Y.-P.
title	Application of laser-cleaning technique for efficient removal of via-etch-induced polymers
title_short	Application of laser-cleaning technique for efficient removal of via-etch-induced polymers
title_full	Application of laser-cleaning technique for efficient removal of via-etch-induced polymers
title_fullStr	Application of laser-cleaning technique for efficient removal of via-etch-induced polymers
title_full_unstemmed	Application of laser-cleaning technique for efficient removal of via-etch-induced polymers
title_sort	application of laser-cleaning technique for efficient removal of via-etch-induced polymers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80299
_version_	1681088861319462912

Application of laser-cleaning technique for efficient removal of via-etch-induced polymers

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