Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

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Main Authors: Lu, Y.-F., Tao, Z.-B., Hong, M.-H.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80316
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-803162024-11-10T16:37:20Z Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study Lu, Y.-F. Tao, Z.-B. Hong, M.-H. ELECTRICAL ENGINEERING DATA STORAGE INSTITUTE Al substrate Laser ablation Plasma diagnosis Spectroscopy Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 38 5 A 2958-2963 JAPLD 2014-10-07T02:56:11Z 2014-10-07T02:56:11Z 1999 Article Lu, Y.-F.,Tao, Z.-B.,Hong, M.-H. (1999). Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 38 (5 A) : 2958-2963. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/80316 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Al substrate
Laser ablation
Plasma diagnosis
Spectroscopy
spellingShingle Al substrate
Laser ablation
Plasma diagnosis
Spectroscopy
Lu, Y.-F.
Tao, Z.-B.
Hong, M.-H.
Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study
description Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Lu, Y.-F.
Tao, Z.-B.
Hong, M.-H.
format Article
author Lu, Y.-F.
Tao, Z.-B.
Hong, M.-H.
author_sort Lu, Y.-F.
title Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study
title_short Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study
title_full Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study
title_fullStr Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study
title_full_unstemmed Characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study
title_sort characteristics of excimer laser induced plasma from an aluminum target by spectroscopic study
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/80316
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