Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester
10.1063/1.112385
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sg-nus-scholar.10635-803252023-10-26T07:56:08Z Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester Phang, J.C.H. Sim, K.S. Chan, D.S.H. ELECTRICAL ENGINEERING 10.1063/1.112385 Applied Physics Letters 65 26 3341-3343 2014-10-07T02:56:17Z 2014-10-07T02:56:17Z 1994 Article Phang, J.C.H., Sim, K.S., Chan, D.S.H. (1994). Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester. Applied Physics Letters 65 (26) : 3341-3343. ScholarBank@NUS Repository. https://doi.org/10.1063/1.112385 00036951 http://scholarbank.nus.edu.sg/handle/10635/80325 A1994PY28000013 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.112385 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Phang, J.C.H. Sim, K.S. Chan, D.S.H. |
| format |
Article |
| author |
Phang, J.C.H. Sim, K.S. Chan, D.S.H. |
| spellingShingle |
Phang, J.C.H. Sim, K.S. Chan, D.S.H. Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester |
| author_sort |
Phang, J.C.H. |
| title |
Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester |
| title_short |
Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester |
| title_full |
Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester |
| title_fullStr |
Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester |
| title_full_unstemmed |
Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester |
| title_sort |
charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80325 |
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1781783899339227136 |