Excimer-laser removal of SiO2 patterns from GaAs substrates

Excimer-laser removal of SiO2 patterns from GaAs substrates

Japanese Journal of Applied Physics, Part 2: Letters

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Bibliographic Details
Main Authors: Lu, Yong-Feng, Takai, Mikio, Shiokawa, Takao, Aoyagi, Yoshinobu
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80407
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/80407

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