Golden-template self-generating method for patterned wafer inspection
Machine Vision and Applications
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2014
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sg-nus-scholar.10635-805062023-10-31T21:11:05Z Golden-template self-generating method for patterned wafer inspection Xie, P. Guan, S.-U. ELECTRICAL ENGINEERING Machine Vision and Applications 12 3 149-156 MVAPE 2014-10-07T02:58:16Z 2014-10-07T02:58:16Z 2000-10 Article Xie, P., Guan, S.-U. (2000-10). Golden-template self-generating method for patterned wafer inspection. Machine Vision and Applications 12 (3) : 149-156. ScholarBank@NUS Repository. 09328092 http://scholarbank.nus.edu.sg/handle/10635/80506 000089927000005 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| description |
Machine Vision and Applications |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Xie, P. Guan, S.-U. |
| format |
Article |
| author |
Xie, P. Guan, S.-U. |
| spellingShingle |
Xie, P. Guan, S.-U. Golden-template self-generating method for patterned wafer inspection |
| author_sort |
Xie, P. |
| title |
Golden-template self-generating method for patterned wafer inspection |
| title_short |
Golden-template self-generating method for patterned wafer inspection |
| title_full |
Golden-template self-generating method for patterned wafer inspection |
| title_fullStr |
Golden-template self-generating method for patterned wafer inspection |
| title_full_unstemmed |
Golden-template self-generating method for patterned wafer inspection |
| title_sort |
golden-template self-generating method for patterned wafer inspection |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80506 |
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1781783915082547200 |