High resolution lens attachment for SEMs

Scanning

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Bibliographic Details
Main Authors: Khursheed, A., Karuppiah, N., Koh, S.H.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80530
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Institution: National University of Singapore
Description
Summary:Scanning