Remashan, K., Chua, S., Ramam, A., Prakash, S., Liu, W., & ENGINEERING, E. (2014). Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples.

Remashan, K., S.J Chua, A. Ramam, S. Prakash, W. Liu, and ELECTRICAL ENGINEERING. Inductively Coupled Plasma Etching of GaN Using BCl3/Cl2 Chemistry and Photoluminescence Studies of the Etched Samples. 2014.

Remashan, K., et al. Inductively Coupled Plasma Etching of GaN Using BCl3/Cl2 Chemistry and Photoluminescence Studies of the Etched Samples. 2014.