Remashan, K., Chua, S., Ramam, A., Prakash, S., Liu, W., & ENGINEERING, E. (2014). Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples.
Chicago Style CitationRemashan, K., S.J Chua, A. Ramam, S. Prakash, W. Liu, and ELECTRICAL ENGINEERING. Inductively Coupled Plasma Etching of GaN Using BCl3/Cl2 Chemistry and Photoluminescence Studies of the Etched Samples. 2014.
MLA引文Remashan, K., et al. Inductively Coupled Plasma Etching of GaN Using BCl3/Cl2 Chemistry and Photoluminescence Studies of the Etched Samples. 2014.
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