Text this: Inductively coupled plasma etching of GaN using BCl3/Cl2 chemistry and photoluminescence studies of the etched samples

 __   _      ___     _____      _____    _    _   
| || | ||   / _ \\  |  __ \\   |  ___|| | \  / || 
| '--' ||  | / \ || | |  \ ||  | ||__   |  \/  || 
| .--. ||  | \_/ || | |__/ ||  | ||__   | .  . || 
|_|| |_||   \___//  |_____//   |_____|| |_|\/|_|| 
`-`  `-`    `---`    -----`    `-----`  `-`  `-`