Laser cleaning of silicon surface with deposition of different liquid films

Laser cleaning of silicon surface with deposition of different liquid films

Applied Surface Science

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Bibliographic Details
Main Authors: Lu, Y.F., Zhang, Y., Wan, Y.H., Song, W.D.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Bubble growth
Cleaning threshold
Laser cleaning
Stress wave
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80656
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/80656

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