Laser induced removal of spherical particles from silicon wafers
Journal of Applied Physics
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2014
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sg-nus-scholar.10635-806582015-02-21T14:44:17Z Laser induced removal of spherical particles from silicon wafers Lu, Y.F. Zheng, Y.W. Song, W.D. ELECTRICAL ENGINEERING DATA STORAGE INSTITUTE Journal of Applied Physics 87 3 1534-1539 JAPIA 2014-10-07T02:59:55Z 2014-10-07T02:59:55Z 2000-02 Article Lu, Y.F.,Zheng, Y.W.,Song, W.D. (2000-02). Laser induced removal of spherical particles from silicon wafers. Journal of Applied Physics 87 (3) : 1534-1539. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80658 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Journal of Applied Physics |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lu, Y.F. Zheng, Y.W. Song, W.D. |
| format |
Article |
| author |
Lu, Y.F. Zheng, Y.W. Song, W.D. |
| spellingShingle |
Lu, Y.F. Zheng, Y.W. Song, W.D. Laser induced removal of spherical particles from silicon wafers |
| author_sort |
Lu, Y.F. |
| title |
Laser induced removal of spherical particles from silicon wafers |
| title_short |
Laser induced removal of spherical particles from silicon wafers |
| title_full |
Laser induced removal of spherical particles from silicon wafers |
| title_fullStr |
Laser induced removal of spherical particles from silicon wafers |
| title_full_unstemmed |
Laser induced removal of spherical particles from silicon wafers |
| title_sort |
laser induced removal of spherical particles from silicon wafers |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80658 |
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1681088928597147648 |