Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents

Japanese Journal of Applied Physics, Part 2: Letters

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Bibliographic Details
Main Authors:	Lu, Yong-Feng, Aoyagi, Yoshinobu
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80662
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80662
record_format	dspace
spelling	sg-nus-scholar.10635-806622015-01-17T01:42:25Z Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents Lu, Yong-Feng Aoyagi, Yoshinobu ELECTRICAL ENGINEERING Japanese Journal of Applied Physics, Part 2: Letters 33 3 B L430-L433 JAPLD 2014-10-07T02:59:57Z 2014-10-07T02:59:57Z 1994 Article Lu, Yong-Feng,Aoyagi, Yoshinobu (1994). Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents. Japanese Journal of Applied Physics, Part 2: Letters 33 (3 B) : L430-L433. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/80662 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Japanese Journal of Applied Physics, Part 2: Letters
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lu, Yong-Feng Aoyagi, Yoshinobu
format	Article
author	Lu, Yong-Feng Aoyagi, Yoshinobu
spellingShingle	Lu, Yong-Feng Aoyagi, Yoshinobu Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents
author_sort	Lu, Yong-Feng
title	Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents
title_short	Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents
title_full	Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents
title_fullStr	Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents
title_full_unstemmed	Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents
title_sort	laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (cfc) solvents
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80662
_version_	1681088929373093888

Laser-induced dry cleaning in air - a new surface cleaning technology in lieu of carbon fluorochloride (CFC) solvents

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