Nano-scale morphology and crystallography of laser-deposited TiN thin films
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
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2014
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sg-nus-scholar.10635-807722015-01-07T00:16:11Z Nano-scale morphology and crystallography of laser-deposited TiN thin films Wang, H.-D. Lu, Y.-F. Mai, Z.-H. Ren, Z.-M. ELECTRICAL ENGINEERING Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 11 6268-6271 JAPND 2014-10-07T03:01:08Z 2014-10-07T03:01:08Z 2000-11 Article Wang, H.-D.,Lu, Y.-F.,Mai, Z.-H.,Ren, Z.-M. (2000-11). Nano-scale morphology and crystallography of laser-deposited TiN thin films. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 (11) : 6268-6271. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/80772 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| country |
Singapore |
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ScholarBank@NUS |
| description |
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Wang, H.-D. Lu, Y.-F. Mai, Z.-H. Ren, Z.-M. |
| format |
Article |
| author |
Wang, H.-D. Lu, Y.-F. Mai, Z.-H. Ren, Z.-M. |
| spellingShingle |
Wang, H.-D. Lu, Y.-F. Mai, Z.-H. Ren, Z.-M. Nano-scale morphology and crystallography of laser-deposited TiN thin films |
| author_sort |
Wang, H.-D. |
| title |
Nano-scale morphology and crystallography of laser-deposited TiN thin films |
| title_short |
Nano-scale morphology and crystallography of laser-deposited TiN thin films |
| title_full |
Nano-scale morphology and crystallography of laser-deposited TiN thin films |
| title_fullStr |
Nano-scale morphology and crystallography of laser-deposited TiN thin films |
| title_full_unstemmed |
Nano-scale morphology and crystallography of laser-deposited TiN thin films |
| title_sort |
nano-scale morphology and crystallography of laser-deposited tin thin films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80772 |
| _version_ |
1681088949895823360 |