Steam laser cleaning of plasma-etch-induced polymers from via holes

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

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Bibliographic Details
Main Authors:	Lee, Y.P., Lu, Y.F., Chan, D.S.H., Low, T.S., Zhou, M.S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Creation of bubbles Excimer laser irradiation Explosive evaporation Isopropanol film Steam laser cleaning
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81218
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81218
record_format	dspace
spelling	sg-nus-scholar.10635-812182015-01-07T15:31:07Z Steam laser cleaning of plasma-etch-induced polymers from via holes Lee, Y.P. Lu, Y.F. Chan, D.S.H. Low, T.S. Zhou, M.S. ELECTRICAL ENGINEERING Creation of bubbles Excimer laser irradiation Explosive evaporation Isopropanol film Steam laser cleaning Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 37 5 A 2524-2529 JAPLD 2014-10-07T03:05:54Z 2014-10-07T03:05:54Z 1998 Article Lee, Y.P.,Lu, Y.F.,Chan, D.S.H.,Low, T.S.,Zhou, M.S. (1998). Steam laser cleaning of plasma-etch-induced polymers from via holes. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 37 (5 A) : 2524-2529. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/81218 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Creation of bubbles Excimer laser irradiation Explosive evaporation Isopropanol film Steam laser cleaning
spellingShingle	Creation of bubbles Excimer laser irradiation Explosive evaporation Isopropanol film Steam laser cleaning Lee, Y.P. Lu, Y.F. Chan, D.S.H. Low, T.S. Zhou, M.S. Steam laser cleaning of plasma-etch-induced polymers from via holes
description	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lee, Y.P. Lu, Y.F. Chan, D.S.H. Low, T.S. Zhou, M.S.
format	Article
author	Lee, Y.P. Lu, Y.F. Chan, D.S.H. Low, T.S. Zhou, M.S.
author_sort	Lee, Y.P.
title	Steam laser cleaning of plasma-etch-induced polymers from via holes
title_short	Steam laser cleaning of plasma-etch-induced polymers from via holes
title_full	Steam laser cleaning of plasma-etch-induced polymers from via holes
title_fullStr	Steam laser cleaning of plasma-etch-induced polymers from via holes
title_full_unstemmed	Steam laser cleaning of plasma-etch-induced polymers from via holes
title_sort	steam laser cleaning of plasma-etch-induced polymers from via holes
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81218
_version_	1681089031251689472

Steam laser cleaning of plasma-etch-induced polymers from via holes

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