Structural study of plasma enhanced chemical vapour deposited silicon carbide films

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

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Bibliographic Details
Main Authors:	Choi, W.K., Gangadharan, S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Annealing Chemical vapour Vapour deposited
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81227
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81227
record_format	dspace
spelling	sg-nus-scholar.10635-812272015-02-21T15:16:27Z Structural study of plasma enhanced chemical vapour deposited silicon carbide films Choi, W.K. Gangadharan, S. ELECTRICAL ENGINEERING Annealing Chemical vapour Vapour deposited Materials Science and Engineering B: Solid-State Materials for Advanced Technology 75 2-3 174-176 2014-10-07T03:06:01Z 2014-10-07T03:06:01Z 2000-06-01 Article Choi, W.K.,Gangadharan, S. (2000-06-01). Structural study of plasma enhanced chemical vapour deposited silicon carbide films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 75 (2-3) : 174-176. ScholarBank@NUS Repository. 09215107 http://scholarbank.nus.edu.sg/handle/10635/81227 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Annealing Chemical vapour Vapour deposited
spellingShingle	Annealing Chemical vapour Vapour deposited Choi, W.K. Gangadharan, S. Structural study of plasma enhanced chemical vapour deposited silicon carbide films
description	Materials Science and Engineering B: Solid-State Materials for Advanced Technology
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Choi, W.K. Gangadharan, S.
format	Article
author	Choi, W.K. Gangadharan, S.
author_sort	Choi, W.K.
title	Structural study of plasma enhanced chemical vapour deposited silicon carbide films
title_short	Structural study of plasma enhanced chemical vapour deposited silicon carbide films
title_full	Structural study of plasma enhanced chemical vapour deposited silicon carbide films
title_fullStr	Structural study of plasma enhanced chemical vapour deposited silicon carbide films
title_full_unstemmed	Structural study of plasma enhanced chemical vapour deposited silicon carbide films
title_sort	structural study of plasma enhanced chemical vapour deposited silicon carbide films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81227
_version_	1681089032926265344

Structural study of plasma enhanced chemical vapour deposited silicon carbide films

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