Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
Solid-State Electronics
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2014
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sg-nus-scholar.10635-812732015-04-06T07:34:01Z Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements Tan, L.S. Leong, M.S. Choo, S.C. ELECTRICAL ENGINEERING Solid-State Electronics 42 4 589-594 SSELA 2014-10-07T03:06:32Z 2014-10-07T03:06:32Z 1998-04-06 Article Tan, L.S.,Leong, M.S.,Choo, S.C. (1998-04-06). Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements. Solid-State Electronics 42 (4) : 589-594. ScholarBank@NUS Repository. 00381101 http://scholarbank.nus.edu.sg/handle/10635/81273 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
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NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Solid-State Electronics |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Tan, L.S. Leong, M.S. Choo, S.C. |
| format |
Article |
| author |
Tan, L.S. Leong, M.S. Choo, S.C. |
| spellingShingle |
Tan, L.S. Leong, M.S. Choo, S.C. Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements |
| author_sort |
Tan, L.S. |
| title |
Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements |
| title_short |
Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements |
| title_full |
Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements |
| title_fullStr |
Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements |
| title_full_unstemmed |
Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements |
| title_sort |
theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81273 |
| _version_ |
1681089041151295488 |