Laser dry cleaning of ZrO2 particles from air bearing surface of magnetic head sliders

• Main Authors: Lu, Y.F., Song, W.D., Hong, M.H., Chong, T.C., Low, T.S.
• 其他作者: ELECTRICAL ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/81513

Materials Research Society Symposium - Proceedings