Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation
Materials Research Society Symposium - Proceedings
Saved in:
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81714 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-81714 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-817142015-01-09T04:10:11Z Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation Lu, Y.F. Lee, Y.P. Zhou, M.S. ELECTRICAL ENGINEERING CHEMISTRY Materials Research Society Symposium - Proceedings 526 415-420 MRSPD 2014-10-07T03:11:15Z 2014-10-07T03:11:15Z 1998 Conference Paper Lu, Y.F.,Lee, Y.P.,Zhou, M.S. (1998). Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation. Materials Research Society Symposium - Proceedings 526 : 415-420. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/81714 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Materials Research Society Symposium - Proceedings |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lu, Y.F. Lee, Y.P. Zhou, M.S. |
| format |
Conference or Workshop Item |
| author |
Lu, Y.F. Lee, Y.P. Zhou, M.S. |
| spellingShingle |
Lu, Y.F. Lee, Y.P. Zhou, M.S. Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation |
| author_sort |
Lu, Y.F. |
| title |
Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation |
| title_short |
Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation |
| title_full |
Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation |
| title_fullStr |
Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation |
| title_full_unstemmed |
Removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation |
| title_sort |
removal of plasma-etch-induced polymers from submicron via holes by excimer laser ablation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81714 |
| _version_ |
1681089121497382912 |