Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect

10.1117/12.405373

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Bibliographic Details
Main Authors:	Tan, L.C.P., Tan, L.S., Leong, M.S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	BJT Carrier redistribution effect Dopant profile Metallurgical junctions On-bevel junctions Spreading resistance profiling Ultrashallow junctions
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81767
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81767
record_format	dspace
spelling	sg-nus-scholar.10635-817672023-10-26T09:22:59Z Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect Tan, L.C.P. Tan, L.S. Leong, M.S. ELECTRICAL ENGINEERING BJT Carrier redistribution effect Dopant profile Metallurgical junctions On-bevel junctions Spreading resistance profiling Ultrashallow junctions 10.1117/12.405373 Proceedings of SPIE - The International Society for Optical Engineering 4227 79-89 PSISD 2014-10-07T03:11:50Z 2014-10-07T03:11:50Z 2000 Conference Paper Tan, L.C.P., Tan, L.S., Leong, M.S. (2000). Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect. Proceedings of SPIE - The International Society for Optical Engineering 4227 : 79-89. ScholarBank@NUS Repository. https://doi.org/10.1117/12.405373 0277786X http://scholarbank.nus.edu.sg/handle/10635/81767 000167995300015 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	BJT Carrier redistribution effect Dopant profile Metallurgical junctions On-bevel junctions Spreading resistance profiling Ultrashallow junctions
spellingShingle	BJT Carrier redistribution effect Dopant profile Metallurgical junctions On-bevel junctions Spreading resistance profiling Ultrashallow junctions Tan, L.C.P. Tan, L.S. Leong, M.S. Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect
description	10.1117/12.405373
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Tan, L.C.P. Tan, L.S. Leong, M.S.
format	Conference or Workshop Item
author	Tan, L.C.P. Tan, L.S. Leong, M.S.
author_sort	Tan, L.C.P.
title	Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect
title_short	Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect
title_full	Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect
title_fullStr	Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect
title_full_unstemmed	Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect
title_sort	spreading resistance profiling of ultrashallow junction npn bjt, with carrier redistribution effect
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81767
_version_	1781783990154297344

Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect

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