Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators

10.1109/JMEMS.2010.2041035

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Bibliographic Details
Main Authors:	Xie, J., Lee, C., Feng, H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	CMOS microelectromechanical systems (MEMS) Energy harvester Power generator Thermoelectric Thermopile
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82135
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82135
record_format	dspace
spelling	sg-nus-scholar.10635-821352024-11-09T08:00:11Z Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators Xie, J. Lee, C. Feng, H. ELECTRICAL & COMPUTER ENGINEERING CMOS microelectromechanical systems (MEMS) Energy harvester Power generator Thermoelectric Thermopile 10.1109/JMEMS.2010.2041035 Journal of Microelectromechanical Systems 19 2 317-324 JMIYE 2014-10-07T04:25:48Z 2014-10-07T04:25:48Z 2010-04 Article Xie, J., Lee, C., Feng, H. (2010-04). Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators. Journal of Microelectromechanical Systems 19 (2) : 317-324. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2010.2041035 10577157 http://scholarbank.nus.edu.sg/handle/10635/82135 000276257700010 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	CMOS microelectromechanical systems (MEMS) Energy harvester Power generator Thermoelectric Thermopile
spellingShingle	CMOS microelectromechanical systems (MEMS) Energy harvester Power generator Thermoelectric Thermopile Xie, J. Lee, C. Feng, H. Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators
description	10.1109/JMEMS.2010.2041035
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Xie, J. Lee, C. Feng, H.
format	Article
author	Xie, J. Lee, C. Feng, H.
author_sort	Xie, J.
title	Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators
title_short	Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators
title_full	Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators
title_fullStr	Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators
title_full_unstemmed	Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators
title_sort	design, fabrication, and characterization of cmos mems-based thermoelectric power generators
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82135
_version_	1821187157413330944

Design, fabrication, and characterization of CMOS MEMS-Based thermoelectric power generators

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