Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators

10.1049/el:20092835

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Bibliographic Details
Main Authors:	Khine, L., Palaniapan, M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82211
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82211
record_format	dspace
spelling	sg-nus-scholar.10635-822112023-10-26T22:01:43Z Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators Khine, L. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING 10.1049/el:20092835 Electronics Letters 45 1 37-39 ELLEA 2014-10-07T04:26:41Z 2014-10-07T04:26:41Z 2009 Article Khine, L., Palaniapan, M. (2009). Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators. Electronics Letters 45 (1) : 37-39. ScholarBank@NUS Repository. https://doi.org/10.1049/el:20092835 00135194 http://scholarbank.nus.edu.sg/handle/10635/82211 000262271100024 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1049/el:20092835
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Khine, L. Palaniapan, M.
format	Article
author	Khine, L. Palaniapan, M.
spellingShingle	Khine, L. Palaniapan, M. Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators
author_sort	Khine, L.
title	Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators
title_short	Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators
title_full	Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators
title_fullStr	Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators
title_full_unstemmed	Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators
title_sort	effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82211
_version_	1781784081989632000

Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators

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