Growth and characterization of silicon nitride films on various underlying materials
10.1007/s003390100881
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2014
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sg-nus-scholar.10635-824312023-10-30T07:54:27Z Growth and characterization of silicon nitride films on various underlying materials Han, G.C. Luo, P. Li, K.B. Liu, Z.Y. Wu, Y.H. PHYSICS ELECTRICAL & COMPUTER ENGINEERING 10.1007/s003390100881 Applied Physics A: Materials Science and Processing 74 2 243-247 APAMF 2014-10-07T04:29:19Z 2014-10-07T04:29:19Z 2002-02 Article Han, G.C., Luo, P., Li, K.B., Liu, Z.Y., Wu, Y.H. (2002-02). Growth and characterization of silicon nitride films on various underlying materials. Applied Physics A: Materials Science and Processing 74 (2) : 243-247. ScholarBank@NUS Repository. https://doi.org/10.1007/s003390100881 09478396 http://scholarbank.nus.edu.sg/handle/10635/82431 000174223800019 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1007/s003390100881 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Han, G.C. Luo, P. Li, K.B. Liu, Z.Y. Wu, Y.H. |
| format |
Article |
| author |
Han, G.C. Luo, P. Li, K.B. Liu, Z.Y. Wu, Y.H. |
| spellingShingle |
Han, G.C. Luo, P. Li, K.B. Liu, Z.Y. Wu, Y.H. Growth and characterization of silicon nitride films on various underlying materials |
| author_sort |
Han, G.C. |
| title |
Growth and characterization of silicon nitride films on various underlying materials |
| title_short |
Growth and characterization of silicon nitride films on various underlying materials |
| title_full |
Growth and characterization of silicon nitride films on various underlying materials |
| title_fullStr |
Growth and characterization of silicon nitride films on various underlying materials |
| title_full_unstemmed |
Growth and characterization of silicon nitride films on various underlying materials |
| title_sort |
growth and characterization of silicon nitride films on various underlying materials |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82431 |
| _version_ |
1781784135490076672 |