Kinetics and mechanisms of the thermal degradation of amorphous carbon films
10.1063/1.1478133
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2014
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sg-nus-scholar.10635-825982023-10-29T22:26:43Z Kinetics and mechanisms of the thermal degradation of amorphous carbon films Zhang, L.H. Gong, H. Wang, J.P. MATERIALS SCIENCE ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1478133 Journal of Applied Physics 91 12 9646-9651 JAPIA 2014-10-07T04:31:15Z 2014-10-07T04:31:15Z 2002-06-15 Article Zhang, L.H., Gong, H., Wang, J.P. (2002-06-15). Kinetics and mechanisms of the thermal degradation of amorphous carbon films. Journal of Applied Physics 91 (12) : 9646-9651. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1478133 00218979 http://scholarbank.nus.edu.sg/handle/10635/82598 000175905200027 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.1478133 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Zhang, L.H. Gong, H. Wang, J.P. |
| format |
Article |
| author |
Zhang, L.H. Gong, H. Wang, J.P. |
| spellingShingle |
Zhang, L.H. Gong, H. Wang, J.P. Kinetics and mechanisms of the thermal degradation of amorphous carbon films |
| author_sort |
Zhang, L.H. |
| title |
Kinetics and mechanisms of the thermal degradation of amorphous carbon films |
| title_short |
Kinetics and mechanisms of the thermal degradation of amorphous carbon films |
| title_full |
Kinetics and mechanisms of the thermal degradation of amorphous carbon films |
| title_fullStr |
Kinetics and mechanisms of the thermal degradation of amorphous carbon films |
| title_full_unstemmed |
Kinetics and mechanisms of the thermal degradation of amorphous carbon films |
| title_sort |
kinetics and mechanisms of the thermal degradation of amorphous carbon films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82598 |
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1781784180015759360 |