Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results
10.1063/1.4776191
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sg-nus-scholar.10635-826902023-10-25T20:10:28Z Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results Ngo, Y.S. Ang, K.T. Tay, A. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.4776191 Review of Scientific Instruments 84 1 - RSINA 2014-10-07T04:32:22Z 2014-10-07T04:32:22Z 2013-01 Article Ngo, Y.S., Ang, K.T., Tay, A. (2013-01). Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results. Review of Scientific Instruments 84 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4776191 00346748 http://scholarbank.nus.edu.sg/handle/10635/82690 000314729100075 Scopus |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
10.1063/1.4776191 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Ngo, Y.S. Ang, K.T. Tay, A. |
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Article |
| author |
Ngo, Y.S. Ang, K.T. Tay, A. |
| spellingShingle |
Ngo, Y.S. Ang, K.T. Tay, A. Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results |
| author_sort |
Ngo, Y.S. |
| title |
Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results |
| title_short |
Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results |
| title_full |
Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results |
| title_fullStr |
Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results |
| title_full_unstemmed |
Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results |
| title_sort |
method for real-time critical dimensions signature monitoring and control: sensor, actuator, and experimental results |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82690 |
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1781784200727232512 |