Micromechanical resonators with sub-micron capacitive gaps in 2 μm process

Electronics Letters

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Main Authors:	Shao, L.C., Palaniapan, M., Khine, L., Tan, W.W.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82696
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Institution:	National University of Singapore

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record_format	dspace
spelling	sg-nus-scholar.10635-826962023-11-01T08:20:31Z Micromechanical resonators with sub-micron capacitive gaps in 2 μm process Shao, L.C. Palaniapan, M. Khine, L. Tan, W.W. ELECTRICAL & COMPUTER ENGINEERING Electronics Letters 43 25 1427-1428 ELLEA 2014-10-07T04:32:25Z 2014-10-07T04:32:25Z 2007 Article Shao, L.C., Palaniapan, M., Khine, L., Tan, W.W. (2007). Micromechanical resonators with sub-micron capacitive gaps in 2 μm process. Electronics Letters 43 (25) : 1427-1428. ScholarBank@NUS Repository. 00135194 http://scholarbank.nus.edu.sg/handle/10635/82696 000252315600019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Electronics Letters
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Shao, L.C. Palaniapan, M. Khine, L. Tan, W.W.
format	Article
author	Shao, L.C. Palaniapan, M. Khine, L. Tan, W.W.
spellingShingle	Shao, L.C. Palaniapan, M. Khine, L. Tan, W.W. Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
author_sort	Shao, L.C.
title	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_short	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_full	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_fullStr	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_full_unstemmed	Micromechanical resonators with sub-micron capacitive gaps in 2 μm process
title_sort	micromechanical resonators with sub-micron capacitive gaps in 2 μm process
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82696
_version_	1781784201660465152

Micromechanical resonators with sub-micron capacitive gaps in 2 μm process

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