MOEMS variable optical attenuators using rotary comb drive actuators

10.1109/LPT.2006.873959

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Bibliographic Details
Main Authors: Yeh, J.A., Jiang, S.-S., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82718
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Institution: National University of Singapore