Patterning of phase change films with microlens arrays

Patterning of phase change films with microlens arrays

10.1016/j.jallcom.2006.02.111

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Bibliographic Details
Main Authors: Lin, Y., Hong, M.H., Chen, G.X., Lim, C.S., Wang, Z.B., Tan, L.S., Shi, L.P., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Atomic force microscopy
Microlens array
Near-field scanning optical microscopy
Phase change
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82867
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/82867

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