Radio frequency substrate bias effect on properties of Co thin film and multilayer structures

10.1016/S0304-8853(02)00292-5

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Bibliographic Details
Main Authors: Ng, V., Hu, J.F., Adeyeye, A.O., Wang, J.P., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82955
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Institution: National University of Singapore
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Summary:10.1016/S0304-8853(02)00292-5