Ren, C., Chan, D., Loh, W., Balakumar, S., Du, A., Tung, C., . . . ENGINEERING, E. &. C. (2014). Work-function tuning of TaN by high-temperature metal intermixing technique for gate-first CMOS process.
Chicago Style CitationRen, C., et al. Work-function Tuning of TaN By High-temperature Metal Intermixing Technique for Gate-first CMOS Process. 2014.
MLA引文Ren, C., et al. Work-function Tuning of TaN By High-temperature Metal Intermixing Technique for Gate-first CMOS Process. 2014.
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