A 3-D movable THz filter using surface micromachining process

A 3-D movable THz filter using surface micromachining process

10.1109/OMN.2013.6659113

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Bibliographic Details
Main Authors: Lin, Y.-S., Ma, F., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
filter
MEMS
metamaterial
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83323
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Institution: National University of Singapore
id sg-nus-scholar.10635-83323
record_format dspace
spelling sg-nus-scholar.10635-833232024-11-09T08:00:05Z A 3-D movable THz filter using surface micromachining process Lin, Y.-S. Ma, F. Lee, C. ELECTRICAL & COMPUTER ENGINEERING filter MEMS metamaterial 10.1109/OMN.2013.6659113 International Conference on Optical MEMS and Nanophotonics 169-170 2014-10-07T04:39:57Z 2014-10-07T04:39:57Z 2013 Conference Paper Lin, Y.-S.,Ma, F.,Lee, C. (2013). A 3-D movable THz filter using surface micromachining process. International Conference on Optical MEMS and Nanophotonics : 169-170. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMN.2013.6659113" target="_blank">https://doi.org/10.1109/OMN.2013.6659113</a> 9781479915125 21605033 http://scholarbank.nus.edu.sg/handle/10635/83323 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic filter
MEMS
metamaterial
spellingShingle filter
MEMS
metamaterial
Lin, Y.-S.
Ma, F.
Lee, C.
A 3-D movable THz filter using surface micromachining process
description 10.1109/OMN.2013.6659113
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Lin, Y.-S.
Ma, F.
Lee, C.
format Conference or Workshop Item
author Lin, Y.-S.
Ma, F.
Lee, C.
author_sort Lin, Y.-S.
title A 3-D movable THz filter using surface micromachining process
title_short A 3-D movable THz filter using surface micromachining process
title_full A 3-D movable THz filter using surface micromachining process
title_fullStr A 3-D movable THz filter using surface micromachining process
title_full_unstemmed A 3-D movable THz filter using surface micromachining process
title_sort 3-d movable thz filter using surface micromachining process
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83323
_version_ 1821188674781446144

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