A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications

A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications

10.1109/NEMS.2013.6559793

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Bibliographic Details
Main Authors: Soon, B.W., Singh, N., Tsai, J.M., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Nanoelectromechanical systems
NEMS
non-volatile memory
NVM
relay
switch
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83334
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83334

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