Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing
International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT
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2014
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sg-nus-scholar.10635-834352015-01-16T03:54:13Z Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing Tan, L.S. Wang, H.T. Chor, E.F. ELECTRICAL & COMPUTER ENGINEERING International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT 3 2320-2323 2014-10-07T04:41:12Z 2014-10-07T04:41:12Z 2004 Conference Paper Tan, L.S.,Wang, H.T.,Chor, E.F. (2004). Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing. International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT 3 : 2320-2323. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/83435 NOT_IN_WOS Scopus |
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National University of Singapore |
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Singapore |
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ScholarBank@NUS |
| description |
International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tan, L.S. Wang, H.T. Chor, E.F. |
| format |
Conference or Workshop Item |
| author |
Tan, L.S. Wang, H.T. Chor, E.F. |
| spellingShingle |
Tan, L.S. Wang, H.T. Chor, E.F. Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing |
| author_sort |
Tan, L.S. |
| title |
Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing |
| title_short |
Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing |
| title_full |
Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing |
| title_fullStr |
Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing |
| title_full_unstemmed |
Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing |
| title_sort |
activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83435 |
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1681089435276410880 |