Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators

16th Opto-Electronics and Communications Conference, OECC 2011

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Main Authors:	Koh, K.H., Kobayashi, T., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83624
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-836242015-01-12T22:25:16Z Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators Koh, K.H. Kobayashi, T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 16th Opto-Electronics and Communications Conference, OECC 2011 323-324 2014-10-07T04:43:18Z 2014-10-07T04:43:18Z 2011 Conference Paper Koh, K.H.,Kobayashi, T.,Lee, C. (2011). Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators. 16th Opto-Electronics and Communications Conference, OECC 2011 : 323-324. ScholarBank@NUS Repository. 9781612842882 http://scholarbank.nus.edu.sg/handle/10635/83624 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	16th Opto-Electronics and Communications Conference, OECC 2011
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Kobayashi, T. Lee, C.
format	Conference or Workshop Item
author	Koh, K.H. Kobayashi, T. Lee, C.
spellingShingle	Koh, K.H. Kobayashi, T. Lee, C. Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
author_sort	Koh, K.H.
title	Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
title_short	Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
title_full	Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
title_fullStr	Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
title_full_unstemmed	Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
title_sort	development of actuation mechanisms for mems mirror using pzt thin film cantilever actuators
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83624
_version_	1681089470199234560

Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators

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