Fabrication and characterization of a silicon nanofin non-volatile memory

10.1109/Transducers.2013.6626911

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Main Authors: Soon, B., Singh, N., Tsai, J.M., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83720
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-837202015-01-07T16:59:23Z Fabrication and characterization of a silicon nanofin non-volatile memory Soon, B. Singh, N. Tsai, J.M. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Nanoelectromechanical system NEMS non-volatile memory relay switch van der Waals 10.1109/Transducers.2013.6626911 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 892-895 2014-10-07T04:44:24Z 2014-10-07T04:44:24Z 2013 Conference Paper Soon, B.,Singh, N.,Tsai, J.M.,Lee, C. (2013). Fabrication and characterization of a silicon nanofin non-volatile memory. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 : 892-895. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/Transducers.2013.6626911" target="_blank">https://doi.org/10.1109/Transducers.2013.6626911</a> 9781467359818 http://scholarbank.nus.edu.sg/handle/10635/83720 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Nanoelectromechanical system
NEMS
non-volatile memory
relay
switch
van der Waals
spellingShingle Nanoelectromechanical system
NEMS
non-volatile memory
relay
switch
van der Waals
Soon, B.
Singh, N.
Tsai, J.M.
Lee, C.
Fabrication and characterization of a silicon nanofin non-volatile memory
description 10.1109/Transducers.2013.6626911
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Soon, B.
Singh, N.
Tsai, J.M.
Lee, C.
format Conference or Workshop Item
author Soon, B.
Singh, N.
Tsai, J.M.
Lee, C.
author_sort Soon, B.
title Fabrication and characterization of a silicon nanofin non-volatile memory
title_short Fabrication and characterization of a silicon nanofin non-volatile memory
title_full Fabrication and characterization of a silicon nanofin non-volatile memory
title_fullStr Fabrication and characterization of a silicon nanofin non-volatile memory
title_full_unstemmed Fabrication and characterization of a silicon nanofin non-volatile memory
title_sort fabrication and characterization of a silicon nanofin non-volatile memory
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83720
_version_ 1681089487854108672