Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications

10.1117/12.580222

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Main Authors: Sugioka, K., Midorikawa, K., Yamaoka, H., Gomi, Y., Otsuki, M., Hong, M.H., Wu, D.J., Wong, L.L., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/83765
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-837652023-10-30T07:17:51Z Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications Sugioka, K. Midorikawa, K. Yamaoka, H. Gomi, Y. Otsuki, M. Hong, M.H. Wu, D.J. Wong, L.L. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING Glass Industrial application LIPAA Metallization Microfabrication 10.1117/12.580222 Proceedings of SPIE - The International Society for Optical Engineering 5506 1-10 PSISD 2014-10-07T04:44:56Z 2014-10-07T04:44:56Z 2004 Conference Paper Sugioka, K., Midorikawa, K., Yamaoka, H., Gomi, Y., Otsuki, M., Hong, M.H., Wu, D.J., Wong, L.L., Chong, T.C. (2004). Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications. Proceedings of SPIE - The International Society for Optical Engineering 5506 : 1-10. ScholarBank@NUS Repository. https://doi.org/10.1117/12.580222 0277786X http://scholarbank.nus.edu.sg/handle/10635/83765 000223391500001 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Glass
Industrial application
LIPAA
Metallization
Microfabrication
spellingShingle Glass
Industrial application
LIPAA
Metallization
Microfabrication
Sugioka, K.
Midorikawa, K.
Yamaoka, H.
Gomi, Y.
Otsuki, M.
Hong, M.H.
Wu, D.J.
Wong, L.L.
Chong, T.C.
Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications
description 10.1117/12.580222
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Sugioka, K.
Midorikawa, K.
Yamaoka, H.
Gomi, Y.
Otsuki, M.
Hong, M.H.
Wu, D.J.
Wong, L.L.
Chong, T.C.
format Conference or Workshop Item
author Sugioka, K.
Midorikawa, K.
Yamaoka, H.
Gomi, Y.
Otsuki, M.
Hong, M.H.
Wu, D.J.
Wong, L.L.
Chong, T.C.
author_sort Sugioka, K.
title Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications
title_short Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications
title_full Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications
title_fullStr Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications
title_full_unstemmed Glass microprocessing by laser-induced plasma-assited ablation - Fundamental to industrial applications
title_sort glass microprocessing by laser-induced plasma-assited ablation - fundamental to industrial applications
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83765
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