Optimised antireflection coatings using silicon nitride on textured silicon surfaces based on measurements and multidimensional modelling

10.1016/j.egypro.2012.02.009

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Bibliographic Details
Main Authors: Duttagupta, S., Ma, F., Hoex, B., Mueller, T., Aberle, A.G.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84057
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Institution: National University of Singapore