Submicron Co(TaC) line array produced by electron-beam direct writing

10.1063/1.1558254

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Bibliographic Details
Main Authors: Zhao, Y., Zhou, T.J., Wang, J.P., Thong, J.T.L., Yao, X.F., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84256
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Institution: National University of Singapore