Transient temperature measurements of resist heating using nanothermocouples
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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2014
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sg-nus-scholar.10635-843212015-01-08T00:27:32Z Transient temperature measurements of resist heating using nanothermocouples Chu, D. Wong, W.-K. Goodson, K.E. Pease, R.F.W. ELECTRICAL & COMPUTER ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 6 2985-2989 JVTBD 2014-10-07T04:51:21Z 2014-10-07T04:51:21Z 2003-11 Conference Paper Chu, D.,Wong, W.-K.,Goodson, K.E.,Pease, R.F.W. (2003-11). Transient temperature measurements of resist heating using nanothermocouples. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 (6) : 2985-2989. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/84321 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Chu, D. Wong, W.-K. Goodson, K.E. Pease, R.F.W. |
| format |
Conference or Workshop Item |
| author |
Chu, D. Wong, W.-K. Goodson, K.E. Pease, R.F.W. |
| spellingShingle |
Chu, D. Wong, W.-K. Goodson, K.E. Pease, R.F.W. Transient temperature measurements of resist heating using nanothermocouples |
| author_sort |
Chu, D. |
| title |
Transient temperature measurements of resist heating using nanothermocouples |
| title_short |
Transient temperature measurements of resist heating using nanothermocouples |
| title_full |
Transient temperature measurements of resist heating using nanothermocouples |
| title_fullStr |
Transient temperature measurements of resist heating using nanothermocouples |
| title_full_unstemmed |
Transient temperature measurements of resist heating using nanothermocouples |
| title_sort |
transient temperature measurements of resist heating using nanothermocouples |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84321 |
| _version_ |
1681089597072736256 |