APA引文

Ong, P., Wei, J., Tay, F., Iliescu, C., & ENGINEERING, M. (2014). A new fabrication method for low stress PECVD - SiNx layers.

Chicago Style Citation

Ong, P.L., J. Wei, F.E.H Tay, C. Iliescu, and MECHANICAL ENGINEERING. A New Fabrication Method for Low Stress PECVD - SiNx Layers. 2014.

MLA引文

Ong, P.L., et al. A New Fabrication Method for Low Stress PECVD - SiNx Layers. 2014.