A new fabrication method for low stress PECVD - SiNx layers

10.1088/1742-6596/34/1/126

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Bibliographic Details
Main Authors: Ong, P.L., Wei, J., Tay, F.E.H., Iliescu, C.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84796
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Institution: National University of Singapore