Numerical analysis of p+ emitters passivated by a PECVD AlO x/SiNx stack

Numerical analysis of p+ emitters passivated by a PECVD AlO x/SiNx stack

10.1016/j.egypro.2013.07.258

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Bibliographic Details
Main Authors: Ma, F.-J., Duttagupta, S., Peters, M., Samudra, G.S., Aberle, A.G., Hoex, B.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Alox/SiNx stacks
Crystalline silicon
Emitter saturation current density
Pyramidal texture
Surface passivation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84028
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/84028

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