Numerical analysis of p+ emitters passivated by a PECVD AlO x/SiNx stack

• Main Authors: Ma, F.-J., Duttagupta, S., Peters, M., Samudra, G.S., Aberle, A.G., Hoex, B.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Alox/SiNx stacks; Crystalline silicon; Emitter saturation current density; Pyramidal texture; Surface passivation
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84028
• Institution: National University of Singapore

10.1016/j.egypro.2013.07.258