A new fabrication method for low stress PECVD - SiNx layers
10.1088/1742-6596/34/1/126
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sg-nus-scholar.10635-847962023-10-25T23:34:03Z A new fabrication method for low stress PECVD - SiNx layers Ong, P.L. Wei, J. Tay, F.E.H. Iliescu, C. MECHANICAL ENGINEERING 10.1088/1742-6596/34/1/126 Journal of Physics: Conference Series 34 1 764-769 2014-10-07T09:00:24Z 2014-10-07T09:00:24Z 2006-04-01 Article Ong, P.L., Wei, J., Tay, F.E.H., Iliescu, C. (2006-04-01). A new fabrication method for low stress PECVD - SiNx layers. Journal of Physics: Conference Series 34 (1) : 764-769. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/126 17426588 http://scholarbank.nus.edu.sg/handle/10635/84796 000286667100126 Scopus |
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10.1088/1742-6596/34/1/126 |
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MECHANICAL ENGINEERING |
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MECHANICAL ENGINEERING Ong, P.L. Wei, J. Tay, F.E.H. Iliescu, C. |
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Ong, P.L. Wei, J. Tay, F.E.H. Iliescu, C. |
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Ong, P.L. Wei, J. Tay, F.E.H. Iliescu, C. A new fabrication method for low stress PECVD - SiNx layers |
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Ong, P.L. |
title |
A new fabrication method for low stress PECVD - SiNx layers |
title_short |
A new fabrication method for low stress PECVD - SiNx layers |
title_full |
A new fabrication method for low stress PECVD - SiNx layers |
title_fullStr |
A new fabrication method for low stress PECVD - SiNx layers |
title_full_unstemmed |
A new fabrication method for low stress PECVD - SiNx layers |
title_sort |
new fabrication method for low stress pecvd - sinx layers |
publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/84796 |
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1781784509031645184 |