A new fabrication method for low stress PECVD - SiNx layers
10.1088/1742-6596/34/1/126
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Main Authors: | Ong, P.L., Wei, J., Tay, F.E.H., Iliescu, C. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/84796 |
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Institution: | National University of Singapore |
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