Impacts of light illumination on monocrystalline silicon surfaces passivated by atomic layer deposited Al2O3 capped with plasma-enhanced chemical vapor deposited SiNX

Impacts of light illumination on monocrystalline silicon surfaces passivated by atomic layer deposited Al2O3 capped with plasma-enhanced chemical vapor deposited SiNX

10.7567/JJAP.56.08MB01

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Bibliographic Details
Main Authors: Lin, Fen, Toh, Mei Gi, Thway, Maung, Li, Xinhang, Nandakumar, Naomi, Gay, Xavier, Dielissen, Bas, Raj, Samuel, Aberle, Armin G
Other Authors: DEPT OF ELECTRICAL & COMPUTER ENGG
Format: Article
Language:English
Published: IOP PUBLISHING LTD 2019
Subjects:
Science & Technology
Physical Sciences
Physics, Applied
Physics
SOLAR-CELLS
CRYSTALLINE SILICON
INDUCED DEGRADATION
TEMPERATURE
NITRIDE
Online Access:https://scholarbank.nus.edu.sg/handle/10635/155046
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Institution: National University of Singapore
Language: English

Internet

https://scholarbank.nus.edu.sg/handle/10635/155046

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