Impacts of light illumination on monocrystalline silicon surfaces passivated by atomic layer deposited Al2O3 capped with plasma-enhanced chemical vapor deposited SiNX

10.7567/JJAP.56.08MB01

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書目詳細資料
Main Authors: Lin, Fen, Toh, Mei Gi, Thway, Maung, Li, Xinhang, Nandakumar, Naomi, Gay, Xavier, Dielissen, Bas, Raj, Samuel, Aberle, Armin G
其他作者: ELECTRICAL AND COMPUTER ENGINEERING
格式: Article
語言:English
出版: IOP PUBLISHING LTD 2019
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在線閱讀:https://scholarbank.nus.edu.sg/handle/10635/155046
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機構: National University of Singapore
語言: English