Impacts of light illumination on monocrystalline silicon surfaces passivated by atomic layer deposited Al2O3 capped with plasma-enhanced chemical vapor deposited SiNX

Impacts of light illumination on monocrystalline silicon surfaces passivated by atomic layer deposited Al2O3 capped with plasma-enhanced chemical vapor deposited SiNX

10.7567/JJAP.56.08MB01

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Bibliographic Details
Main Authors:	Lin, Fen, Toh, Mei Gi, Thway, Maung, Li, Xinhang, Nandakumar, Naomi, Gay, Xavier, Dielissen, Bas, Raj, Samuel, Aberle, Armin G
Other Authors:	DEPT OF ELECTRICAL & COMPUTER ENGG
Format:	Article
Language:	English
Published:	IOP PUBLISHING LTD 2019
Subjects:	Science & Technology Physical Sciences Physics, Applied Physics SOLAR-CELLS CRYSTALLINE SILICON INDUCED DEGRADATION TEMPERATURE NITRIDE
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/155046
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Institution:	National University of Singapore
Language:	English

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Summary:	10.7567/JJAP.56.08MB01