Impacts of light illumination on monocrystalline silicon surfaces passivated by atomic layer deposited Al2O3 capped with plasma-enhanced chemical vapor deposited SiNX

by Lin, Fen, Toh, Mei Gi, Thway, Maung, Li, Xinhang, Nandakumar, Naomi, Gay, Xavier, Dielissen, Bas, Raj, Samuel, Aberle, Armin G
Published 2019